De Gryse, O.O.De GryseClauws, P.P.ClauwsVan Landuyt, J.J.Van LanduytLebedev, O.O.LebedevClaeys, CorCorClaeysSimoen, EddyEddySimoenVanhellemont, JanJanVanhellemont2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6187Oxide phase determination in silicon using infrared spectroscopy and transmission electron microscopy techniquesJournal article