Armini, SilviaSilviaArminiWhelan, CarolineCarolineWhelanMaex, KarenKarenMaexHernandez, Jose LuisJose LuisHernandezMoinpour, MansourMansourMoinpour2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11657Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity studyJournal article