Renaud, MichaelMichaelRenaudSterken, TomTomSterkenSchmitz, AndreasAndreasSchmitzFiorini, PaoloPaoloFioriniVan Hoof, ChrisChrisVan HoofPuers, BobBobPuers2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12775Piezoelectic harvesters and MEMS technology: fabrication, modeling and measurementsProceedings paper