Metal-organic framework ZIF-8 films as low- $j dielectrics in microelectronics

Eslava, S.S.EslavaZhang, LipingLipingZhangEsconjauregui, S.S.EsconjaureguiYang, J.J.YangVanstreels, KrisKrisVanstreelsBaklanov, MikhaïlMikhaïlBaklanovSaiz, EESaiz2021-10-212021-10-2120130003-6951https://imec-publications.be/handle/20.500.12860/22317Metal-organic framework ZIF-8 films as low- $j dielectrics in microelectronicsJournal article