Understanding the impact of CD-SEM artifacts on metrology via experiments and simulations

Fang, ChaoChaoFangVaglio Pret, AlessandroAlessandroVaglio PretSmith, Mark D.Mark D.SmithBiafore, John J.John J.BiaforeRobertson, StewardStewardRobertsonBekaert, JoostJoostBekaert2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25262Understanding the impact of CD-SEM artifacts on metrology via experiments and simulationsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2211010