Linewidth and roughness measurement of SAOP by using FIB and planer-TEM as reference metrology

Takamasu, KiyoshiKiyoshiTakamasuTakahashi, SatoruSatoruTakahashiKawada, HirokiHirokiKawadaIkota, MasamiMasamiIkotaDecoster, StefanStefanDecosterLazzarino, FredericFredericLazzarinoLorusso, GianGianLorusso2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34099Linewidth and roughness measurement of SAOP by using FIB and planer-TEM as reference metrologyProceedings paperhttps://doi.org/10.1117/12.2515989