Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving

Jeong, YongbinYongbinJeongGenoe, JanJanGenoeGijsenbergh, PieterPieterGijsenberghSegers, JeremyJeremySegersHeremans, PaulPaulHeremansCheyns, DavidDavidCheyns2021-11-172021-11-022021-11-032021-11-1720211057-7157WOS:000611287500015https://imec-publications.be/handle/20.500.12860/38262Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency DrivingJournal article10.1109/JMEMS.2020.3043052WOS:000611287500015