An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness

van Spengen, MerlijnMerlijnvan SpengenDe Wolf, IngridIngridDe WolfPuers, BobBobPuers2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4856An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughnessProceedings paper