Direct measurement of the inversion charge in MOSFETs: application to mobility extraction in alternative gate dielectrics

Kerber, AndreasAndreasKerberCartier, EduardEduardCartierRagnarsson, Lars-AkeLars-AkeRagnarssonRosmeulen, MaartenMaartenRosmeulenPantisano, LuigiLuigiPantisanoDegraeve, RobinRobinDegraeveKim, Young-ChangYoung-ChangKimGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7729Direct measurement of the inversion charge in MOSFETs: application to mobility extraction in alternative gate dielectricsProceedings paper