Pureti, RathaiahRathaiahPuretiDouhard, BastienBastienDouhardDelmotte, JorisJorisDelmotteMerkulov, AlexandreAlexandreMerkulovVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-2220140142-2421https://imec-publications.be/handle/20.500.12860/24401Cesium/xenon dual beam sputtering in a Cameca instrumentJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/sia.5658/abstract