GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

Halder, SandipSandipHalderStiers, KarenKarenStiersKandaswamy, Prem KumarPrem KumarKandaswamyRosmeulen, MaartenMaartenRosmeulenCarbonell, LaureLaureCarbonellSaripalli, YogaYogaSaripalliOsman, HarisHarisOsmanRosseel, ErikErikRosseelMani, AntonioAntonioManiHu, QionaQionaHuVedula, SrinivasSrinivasVedulaPolli, MarcoMarcoPolli2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22452GaN-on-Si process defect detection and analysis for HB-LEDs and power devicesProceedings paper