Introduction of high-k materials into wet processing, analysis and behavior

Onsia, BartBartOnsiaHellin, DavidDavidHellinClaes, MartineMartineClaesMaes, A.A.MaesDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7957Introduction of high-k materials into wet processing, analysis and behaviorProceedings paper