Bogaerts, WimWimBogaertsTaillaert, DirkDirkTaillaertBaets, RoelRoelBaetsWiaux, VincentVincentWiauxBeckx, StephanStephanBeckxMaenhoudt, MireilleMireilleMaenhoudtVandenberghe, GeertGeertVandenberghe2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5082SOI photonic crystal fabrication using deep UV lithographyProceedings paper