Vandervorst, WilfriedWilfriedVandervorstEveraert, Jean-LucJean-LucEveraertRosseel, ErikErikRosseelJurczak, GosiaGosiaJurczakHoffmann, ThomasThomasHoffmannEyben, PierrePierreEybenMody, JayJayModyZschaetzsch, GerdGerdZschaetzschKoelling, SebastianSebastianKoellingGilbert, MatthieuMatthieuGilbertPoon, T.T.Poondel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua BorniquelFoad, M.M.FoadDuffy, RayRayDuffyPawlak, BartekBartekPawlak2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14703Conformal doping of FINFET's: a fabrication and metrology challengeProceedings paper