Impact of template shape on pattern placement and CDU for grapho-epitaxy DSA

Boeckx, CarolienCarolienBoeckxDoise, JanJanDoiseBekaert, JoostJoostBekaertGronheid, RoelRoelGronheidDe Gendt, StefanStefanDe Gendt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26357Impact of template shape on pattern placement and CDU for grapho-epitaxy DSAProceedings paper