Nucleation and growth dependence of ALD WNC on substrate surface condition

Abell, ThomasThomasAbellSchuhmacher, JörgJörgSchuhmacherTravaly, YoussefYoussefTravalyMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8455Nucleation and growth dependence of ALD WNC on substrate surface conditionProceedings paper