Deng, KerongKerongDengErofeev, IvanIvanErofeevRay Chowdhuri, AngshumanAngshumanRay ChowdhuriSaidov, KhakimjonKhakimjonSaidovAabdin, ZainulZainulAabdinPacco, AntoineAntoinePaccoPhilipsen, HaroldHaroldPhilipsenHolsteyns, FrankFrankHolsteynsVinh Huynh, HanHanVinh HuynhMirsaidov, UtkurUtkurMirsaidov2024-02-052023-09-062024-02-052023-091012-0394https://imec-publications.be/handle/20.500.12860/42472Controlled and Uniform Wet Etching of Molybdenum NanowiresProceedings paperhttps://doi.org/10.4028/p-c36cTYMaterials sciencewet chemical etchingmolybdenum (Mo)