Effect of crystallisation on fatigue in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 layers

Norga, GerdGerdNorgaWouters, DirkDirkWoutersBartic, AndreiAndreiBarticFè, LauraLauraFèMaes, HermanHermanMaes2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2812Effect of crystallisation on fatigue in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 layersProceedings paper