SSRM and SCM observation of enhanced lateral As-diffusion induced by nitride spacers

Eyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonClarysse, TrudoTrudoClarysseDe Wolf, IngridIngridDe WolfBadenes, GonçalGonçalBadenesVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4364SSRM and SCM observation of enhanced lateral As-diffusion induced by nitride spacersOral presentation