Zn channeled implantation in GaN: damages investigated by using high resolution XTEM and channeling RBS

Ding, F.R.F.R.DingHe, W.W.HeVantomme, AndreAndreVantommeZhao, Q.Q.ZhaoPipeleers, B.B.PipeleersJacobs, K.K.JacobsMoerman, IngridIngridMoerman2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7522Zn channeled implantation in GaN: damages investigated by using high resolution XTEM and channeling RBSJournal article