Vanackere, TomTomVanackereHermans, ArturArturHermansChristen, IanIanChristenPanuski, ChristopherChristopherPanuskiDong, MarkMarkDongZimmermann, MatthewMatthewZimmermannRaniwala, HamzaHamzaRaniwalaLeenheer, Andrew J.Andrew J.LeenheerEichenfield, MattMattEichenfieldGilbert, GeraldGeraldGilbertEnglund, DirkDirkEnglund2026-06-152026-06-1520252041-1723https://imec-publications.be/handle/20.500.12860/59684Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems—including cold atoms, ions, and solid-state color centers—presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology operating in the visible to near-infrared wavelength range. We introduce a scalable modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200 mm diameter silicon wafers with CMOS-compatible processes. We present a proof-of-concept device with 4 × 4 individually addressable 50 μm × 50 μm pixels or channels, each containing a resonant waveguide grating with a ~ 780 nm design wavelength, supporting > 100 MHz modulation speeds, and a spectral response with > 20 dB extinction.engJournal article10.1038/s41467-025-66718-4WOS:001651210600001PHOTONICSCAVITYMEDLINE:41298444