Hon, K.K.HonCouet, SebastienSebastienCouetVudya Sethu, Kiran KumarKiran KumarVudya SethuSwerts, JohanJohanSwertsKar, Gouri SankarGouri SankarKar2021-12-152021-11-022021-12-1520210040-6090WOS:000672538500009https://imec-publications.be/handle/20.500.12860/37800Effect of nitrogen doping on the structure of metastable /3-W on SiO2Journal article10.1016/j.tsf.2021.138795WOS:000672538500009BETA-WPHASE-TRANSFORMATIONTUNGSTEN FILMSTHIN-FILMSRESISTIVITY