Conard, ThierryThierryConardFranquet, AlexisAlexisFranquetVandervorst, WilfriedWilfriedVandervorstReading, M.M.Readingvan den Berg, J.A.J.A.van den BergVan Elshocht, SvenSvenVan ElshochtSchram, TomTomSchramAdelmann, ChristophChristophAdelmannDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13553Physical characterization of the metal/high-k layer interaction upon annealingMeeting abstract