Mitigating mask roughness via pupil filtering

Baylav, BurakBurakBaylavMaloney, ChrisChrisMaloneyLevinson, ZacZacLevinsonBekaert, JoostJoostBekaertVaglio Pret, AlessandroAlessandroVaglio PretSmith, BruceBruceSmith2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23524Mitigating mask roughness via pupil filteringProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857412