Le, Quoc ToanQuoc ToanLeStruyf, HerbertHerbertStruyfBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullartKesters, ElsElsKestersVan Puymbroeck, JanJanVan PuymbroeckVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10759Restoration of surface and bulk properties of ash plasma-treated porous low-k dielectricsOral presentation