Pulsed force-scanning spreading resistance microscopy (PF-SSRM) for high spatial resolution 2D-dopant profiling

Eyben, PierrePierreEybenFouchier, MarcMarcFouchierAlbart, P.P.AlbartCharon-Verstappen, J.J.Charon-VerstappenVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6317Pulsed force-scanning spreading resistance microscopy (PF-SSRM) for high spatial resolution 2D-dopant profilingProceedings paper