Hoenicke, PhilippPhilippHoenickeKayser, YvesYvesKayserSoltwisch, VictorVictorSoltwischWaehlish, AndreAndreWaehlishWauschkuhn, NilsNilsWauschkuhnScheerder, JeroenJeroenScheerderFleischmann, ClaudiaClaudiaFleischmannBogdanowicz, JanuszJanuszBogdanowiczCharley, Anne-LaureAnne-LaureCharleyVeloso, AnabelaAnabelaVelosoLoo, RogerRogerLooMertens, HansHansMertensHikavyy, AndriyAndriyHikavyySiefke, ThomasThomasSiefkeAndrle, AnnaAnnaAndrleGwalt, GrzegorzGrzegorzGwaltSiewert, FrankFrankSiewertCiesielski, RichardRichardCiesielskiBeckhoff, BurkhardBurkhardBeckhoff2023-12-182023-07-282023-12-182023978-1-5106-6099-10277-786XWOS:001022962000045https://imec-publications.be/handle/20.500.12860/42243Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniquesProceedings paper10.1117/12.2657963978-1-5106-6100-4WOS:001022962000045QUANTIFICATION