De Wolf, IngridIngridDe WolfCzarnecki, PiotrPiotrCzarneckiJourdain, AnneAnneJourdainModlinski, RobertRobertModlinskiTilmans, HarrieHarrieTilmansPuers, BobBobPuersvan Beek, JoostJoostvan Beekvan Spengen, MerlijnMerlijnvan Spengen2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10338The influence of the package environment on the functioning and reliability of capacitive RF-MEMS switchesJournal article