Improvement of the dynamic characteristics of Au-free AlGaN/GaN Schottky diodes on 200 mm Si wafers by surface treatments

Lenci, SilviaSilviaLenciHu, JieJieHuVan Hove, MarleenMarleenVan HoveRonchi, NicoloNicoloRonchiDecoutere, StefaanStefaanDecoutere2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24110Improvement of the dynamic characteristics of Au-free AlGaN/GaN Schottky diodes on 200 mm Si wafers by surface treatmentsProceedings paper