Real 3D depth profiling of heterogeneous microelectronic structures using a combined ToF-SIMS/in-situ SPM tool

Franquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30728Real 3D depth profiling of heterogeneous microelectronic structures using a combined ToF-SIMS/in-situ SPM toolOral presentation