Formation of Ni(Ge1-ySny)/Ge1-xSnx/Ge contact for Ge1-xSnx source/drain Stressor

Nishimura, T.T.NishimuraNakatsuka, O.O.NakatsukaShimura, Y.Y.ShimuraTakeuchi, S.S.TakeuchiVincent, BenjaminBenjaminVincentVantomme, AndreAndreVantommeDekoster, JohanJohanDekosterCaymax, MattyMattyCaymaxLoo, RogerRogerLooZaima, S.S.Zaima2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17699Formation of Ni(Ge1-ySny)/Ge1-xSnx/Ge contact for Ge1-xSnx source/drain StressorOral presentation