Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives

De Smedt, FrankFrankDe SmedtVankerckhoven, HansHansVankerckhovenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6214Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additivesOral presentation