Selective sidewall airgap integration for deep submicrometer interconnects

Gueneau de Mussy, Jean PaulJean PaulGueneau de MussyRichard, OlivierOlivierRichardBeyer, GeraldGeraldBeyerMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8989Selective sidewall airgap integration for deep submicrometer interconnectsJournal article