Turk, MichaelMichaelTurkRock, SimonSimonRockAmanapu, HariHariAmanapuTeugels, LieveLieveTeugelsRoy, DipankarDipankarRoy2021-10-212021-10-212013-032162-8769https://imec-publications.be/handle/20.500.12860/23197Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of rutheniumJournal articlehttp://jss.ecsdl.org/content/2/5/P205.full