Extraction of the oxide charge density at front and back interfaces of SOI NMOSFET devices

Nicolett, A. S.A. S.NicolettMartino, Joao AntonioJoao AntonioMartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5514Extraction of the oxide charge density at front and back interfaces of SOI NMOSFET devicesProceedings paper