Impact of in-situ annealing on the deep levels in Ni-Au/AlN/Si MIS Capacitors

Wang, ChongChongWangLi, W.W.LiZhao, MingMingZhaoSimoen, EddyEddySimoen2021-10-272021-10-2720191862-6300https://imec-publications.be/handle/20.500.12860/34418Impact of in-situ annealing on the deep levels in Ni-Au/AlN/Si MIS CapacitorsJournal articlehttps://doi.org/10.1002/pssa.201900248