Impact of Seed Annealing on the Reliability of Monolithic GaAs/Si p-n Diode Optical Phase Shifters

Tsiara, ArtemisiaArtemisiaTsiaraKim, YounghyunYounghyunKimYudistira, DiditDiditYudistiraKunert, BernardetteBernardetteKunertBaryshnikova, MarinaMarinaBaryshnikovaPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutCroes, KristofKristofCroes2023-05-252023-03-262023-05-252022naWOS:000925380500039https://imec-publications.be/handle/20.500.12860/41378Impact of Seed Annealing on the Reliability of Monolithic GaAs/Si p-n Diode Optical Phase ShiftersProceedings paper978-1-957171-15-9WOS:000925380500039