Platinum template layer for texture control in PZT fecaps with reactively sputtered RuO2 electrode layers

Norga, GerdGerdNorgaWouters, DirkDirkWoutersMaes, HermanHermanMaes2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2062Platinum template layer for texture control in PZT fecaps with reactively sputtered RuO2 electrode layersOral presentation