Metal gate work function engineering for future CMOS technology node

Lima, Lucas Petersen BarbosaLucas Petersen BarbosaLima2021-10-222021-10-222015-08https://imec-publications.be/handle/20.500.12860/25561Metal gate work function engineering for future CMOS technology nodePHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1723954&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US