Selvaraja, ShankarShankarSelvarajaBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutSchaekers, MarcMarcSchaekers2021-10-182021-10-1820100003-6951https://imec-publications.be/handle/20.500.12860/17970Thermal trimming and tuning of hydrogenated amorphous silicon nanophotonic devicesJournal article