Parametric instability of an integrated micromechanical oscillator by means of active optomechanical feedback

Roels, JorisJorisRoelsBogaerts, WimWimBogaertsBaets, RoelRoelBaetsVan Thourhout, DriesDriesVan Thourhout2021-10-192021-10-1920111094-4087https://imec-publications.be/handle/20.500.12860/19701Parametric instability of an integrated micromechanical oscillator by means of active optomechanical feedbackJournal article