Vogt, IvoIvoVogtNakamura, T.T.NakamuraDe Wolf, IngridIngridDe WolfBoit, ChristianChristianBoit2021-10-262021-10-2620180026-2714https://imec-publications.be/handle/20.500.12860/32219Detection of Failure Mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs cameraJournal articlehttps://doi.org/10.1016/j.microrel.2018.06.080