Dekkers, HaroldHaroldDekkersDe Wolf, StefaanStefaanDe WolfAgostinelli, GuidoGuidoAgostinelliDuerinckx, FilipFilipDuerinckxBeaucarne, GuyGuyBeaucarne2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8827Requirements of PECVD SiNx:H layers for bulk passivation of mc-SiProceedings paper