Liang, BoshenBoshenLiangKeulemans, GrimGrimKeulemansEychenne, BriceBriceEychenneJambaldinni, ShrutiShrutiJambaldinniCheyns, DavidDavidCheynsStakenborg, TimTimStakenborgRochus, VeroniqueVeroniqueRochusHeremans, PaulPaulHeremansZhang, LeiLeiZhang2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35478Fabrication of active mcrofluidics on glass with semiconductor grade materialProceedings paper