Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer

Sebaai, FaridFaridSebaaiLoo, RogerRogerLooJourdain, AnneAnneJourdainBeyne, EricEricBeyneKawarazaki, HikaruHikaruKawarazakiTeppei, NakanoNakanoTeppeiAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2025-06-192024-08-072025-06-1920240167-9317WOS:001279983000001https://imec-publications.be/handle/20.500.12860/44274Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layerJournal article10.1016/j.mee.2024.112246WOS:001279983000001