Sequential infiltration synthesis for line edge roughness mitigation of EUV resist

Baryshnikova, MarinaMarinaBaryshnikovaDe Simone, DaniloDaniloDe SimoneChan, BTBTChanRincon Delgadillo, PaulinaPaulinaRincon DelgadilloVandenberghe, GeertGeertVandenbergheKachel, KrzysztofKrzysztofKachelKnaepen, WernerWernerKnaepenMaes, JanJanMaesDe Roest, DavidDavidDe Roest2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27806Sequential infiltration synthesis for line edge roughness mitigation of EUV resistOral presentation