Understanding device performance by incorporating 2D-carrier profiles from high resolution scanning spreading resistance microscopy into device simulations

Nazir, AftabAftabNazirEyben, PierrePierreEybenClarysse, TrudoTrudoClarysseHellings, GeertGeertHellingsSchulze, AndreasAndreasSchulzeMody, JayJayModyDe Meyer, KristinKristinDe MeyerBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-2020120038-1101https://imec-publications.be/handle/20.500.12860/21191Understanding device performance by incorporating 2D-carrier profiles from high resolution scanning spreading resistance microscopy into device simulationsJournal article