Dekkers, HaroldHaroldDekkersPourtois, GeoffreyGeoffreyPourtoisSrinivasan, Nagendra BabuNagendra BabuSrinivasan2021-10-182021-10-182010-010003-6951https://imec-publications.be/handle/20.500.12860/16999Influence of density on N-H bond stretch vibration in plasma enhanced chemical vapor deposited SiNx:HJournal article