Zschaetzsch, GerdGerdZschaetzschSasaki, Y.Y.SasakiHayashi, S.S.HayashiTogo, MitsuhiroMitsuhiroTogoChiarella, ThomasThomasChiarellaKambham, Ajay KumarAjay KumarKambhamMody, J.J.ModyDouhard, BastienBastienDouhardHoriguchi, NaotoNaotoHoriguchiMizuno, B.B.MizunoOgura, M.M.OguraVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20236High performance n-mos FinFET by damage-free, conformal extension dopingProceedings paper