Characterization of Grating Out-Couplers in the Ultraviolet-C Wavelength Range for On-Chip Spectroscopy

Su, ChenmingChenmingSuLe Thomas, NicolasNicolasLe Thomas2025-07-312024-09-202025-07-3120240930-8989WOS:001290811400029https://imec-publications.be/handle/20.500.12860/44542Characterization of Grating Out-Couplers in the Ultraviolet-C Wavelength Range for On-Chip SpectroscopyProceedings paper10.1007/978-3-031-63378-2_29978-3-031-63378-2WOS:001290811400029